Optical fabrication and characterisation of SU-8 disk photonic waveguide heterostructure cavities

In order to demonstrate cavity quantum electrodynamics using photonic crystal (PhC) cavities fabricated around self-assembled quantum dots (QDs), reliable spectral and spatial overlap between the cavity mode and the quantum dot is required. We present a method for using photoresist to optically fabricate heterostructure cavities in a PhC waveguide with a combined photolithography and micro-photoluminescence spectroscopy system. The system can identify single QDs with a spatial precision of ±25 nm, and we confirm the creation of high quality factor cavity modes deterministically placed with the same spatial precision. This method offers a promising route towards bright, on-chip single photon sources for quantum information applications.