Measurement system and model for simultaneously measuring 6DOF geometric errors

Area of Science:

• Metrology and Measurement Science
• Optical Engineering
• Precision Engineering

Background:

• Accurate measurement of six degree-of-freedom (6DOF) geometric errors is critical for high-precision machinery and systems.
• Existing measurement techniques often face challenges with error crosstalk, component fabrication inaccuracies, and beam misalignment.

Purpose of the Study:

• To propose a novel measurement system for simultaneous 6DOF geometric error measurement.
• To develop an integrated optical configuration and a unified measurement model to enhance accuracy.

Main Methods:

• The system combines mono-frequency laser interferometry and laser fiber collimation.
• A unified measurement model is established using the ray-tracing method to compensate for various error sources.
• Numerical simulations were performed using Zemax optical design software.

Main Results:

• The proposed unified measurement model effectively compensates for errors like crosstalk, fabrication defects, and beam drift.
• Zemax simulations confirmed the correctness of the developed measurement model.
• Experimental validation demonstrated the feasibility and effectiveness of the 6DOF measurement system.

Conclusions:

• The developed system and model offer a viable solution for accurate simultaneous 6DOF geometric error measurement.
• The integrated optical design and error compensation strategy significantly improve measurement precision.
• This work contributes to advancements in precision metrology for complex systems.