An improved FIB sample preparation technique for site-specific plan-view specimens: A new cutting geometry

Area of Science:

• Materials Science
• Nanotechnology
• Analytical Chemistry

Background:

• Focused Ion Beam (FIB) microscopy is crucial for correlating atomic structure with material properties.
• Plan-view sample preparation in FIB presents challenges in material removal and milling process monitoring.
• Existing techniques often require extensive material excavation, hindering direct observation.

Purpose of the Study:

• Introduce a novel cutting geometry for FIB lift-out sample preparation in plan-view.
• Address the technical difficulties associated with material removal and in-situ monitoring.
• Enhance the efficiency and success rate of preparing plan-view TEM specimens.

Main Methods:

• A new cutting geometry involves isolating a cuboid specimen connected by a bridge.
• The cuboid is shaped into a triangular prism by wedging its long sides.
• In-situ transfer to a FIB TEM grid using a micromanipulator and custom sample slit.

Main Results:

• The new geometry offers clear viewing angles for precise milling process monitoring.
• Successfully prepares specimens with minimal damage to surrounding materials.
• Demonstrates an improved success rate and efficiency in plan-view FIB lift-out preparation.

Conclusions:

• The developed FIB lift-out technique significantly improves plan-view sample preparation.
• Facilitates direct correlation between atomic structure and micrometer-scale properties.
• Offers a widely applicable method for advanced material science research.