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Related Experiment Video

Updated: Feb 19, 2026

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

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Published on: June 12, 2018

Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.

Chao Zhou¹, Lu Deng², Long Cheng¹

¹State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China.

|November 8, 2017

Summary

This summary is machine-generated.

This study introduces an automated method for aligning nanomanipulator axes within a scanning electron microscope (SEM). The technique enhances precision and speed for nanostructure manipulation, reducing errors and deposition effects.

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Area of Science:

Nanotechnology and Materials Science
Robotics and Automation
Microscopy and Imaging

Background:

Precise positioning and movement are critical for nanostructure manipulation.
Maintaining axis consistency between manipulators and imaging is essential for automated visual servoing.
Existing alignment methods can be time-consuming and susceptible to errors like electron beam induced deposition.

Purpose of the Study:

To develop an automated axis alignment method for nanomanipulators within a scanning electron microscope (SEM).
To improve the accuracy and efficiency of automated manipulation processes.
To mitigate issues such as electron beam induced deposition effects on manipulator tips.

Main Methods:

Proposed an automated method utilizing a closed-loop controlled end-effector to recognize its position.
Characterized the relationship between the nanomanipulator axes and the SEM imaging axis.
Calculated the rotation matrix and analyzed the method's error and transfer function.

Main Results:

Achieved a precision of 0.1 degrees in axis alignment.
Completed the alignment process within 90 seconds.
Demonstrated the method's effectiveness through experimental validation.

Conclusions:

The proposed automated axis alignment method significantly accelerates the alignment process.
This technique enhances the reliability and precision of nanomanipulation in SEM environments.
The method effectively overcomes limitations of traditional alignment approaches.