Optical Emission Spectroscopy on the Gaseous Electronics Conference RF Reference Cell

Area of Science:

• Plasma Physics
• Atomic and Molecular Physics
• Optical Diagnostics

Background:

• The Gaseous Electronics Conference (GEC) radiofrequency (rf) Reference Cell is a standard experimental setup for studying plasmas.
• Understanding plasma behavior is crucial for applications like semiconductor etching.

Purpose of the Study:

• To experimentally investigate and characterize the optical emission from GEC rf Reference Cell plasmas.
• To provide detailed spatial and temporal data on excited atomic and ionic species.

Main Methods:

• Spatially and temporally resolved optical emission spectroscopy.
• Absolute radiometric calibration of measurements.
• Spectral line profile analysis.

Main Results:

• Detailed temporal evolution of optical emission from various excited atomic states and species.
• Radial and axial distributions of emission were mapped.
• Measurements were scaled to an absolute radiometric basis for model comparison.
• Spectral line profiles provided insights into particle velocities.

Conclusions:

• The study provides comprehensive experimental data on GEC rf Reference Cell plasma optical emission.
• The data can be used for validating plasma models and understanding plasma dynamics.
• Insights into particle velocities were gained from spectral line profile analysis.