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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Hyukjin J Kwon1, Seyeong Seok2, Geunbae Lim3

  • 1Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Korea. elkei@postech.ac.kr.

Sensors (Basel, Switzerland)
|November 22, 2017
PubMed

Keywords:
COMSOLMEMSSPICEgyroscopesimulation

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