Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

In this paper, an alumina-zirconia (Al₂O₃-ZrO₂) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al₂O₃/ZrO₂ in nanolaminates: when the content of Al₂O₃ was higher than 50%, the properties of nanolaminates, such as the optical energy gap, dielectric strength (V_ds), capacitance density, and relative permittivity were relatively stable, while the change of these properties became larger when the content of Al₂O₃ was less than 50%. With the content of ZrO₂ varying from 50% to 100%, the variation of these properties was up to 0.482 eV, 2.12 MV/cm, 135.35 nF/cm², and 11.64, respectively. Furthermore, it was demonstrated that the dielectric strength of nanolaminates were influenced significantly by the number (n) of bilayers. Every increment of one Al₂O₃-ZrO₂ bilayer will enhance the dielectric strength by around 0.39 MV/cm (V_ds ≈ 0.86 + 0.39n). This could be contributed to the amorphous alumina which interrupted the grain boundaries of zirconia.