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Updated: Feb 17, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

Published on: April 21, 2016

Biofunctionalized silicon nitride platform for sensing applications.

Hiofan Hoi¹, Salva S Rezaie¹, Lu Gong²

¹Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada T6G 2R3; Ingenuity Lab, Edmonton, Alberta, Canada T6G 2M9.

Biosensors & Bioelectronics

|December 3, 2017

Summary

This summary is machine-generated.

Researchers developed a new method using hydrogen plasma to create amino-functionalized silicon nitride (SiNx) surfaces for biosensors. This technique enables efficient biomolecule immobilization, paving the way for sensitive and compact biosensor development.

Keywords:

DNA immobilization Interface engineering Plasma activation Protein immobilization Silicon nitride Surface modification

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Area of Science:

Materials Science
Biotechnology
Surface Chemistry

Background:

Silicon nitride (SiNx) biosensors merge semiconductor fabrication with biotechnology.
Biofunctionalization of SiNx surfaces is crucial for integrating sensing with data processing.

Purpose of the Study:

To develop a method for amino-functionalizing SiNx surfaces for biomolecule immobilization.
To demonstrate selective surface activation and subsequent biofunctionalization.

Main Methods:

Inductively coupled plasma-reactive ion etching (ICP-RIE) using hydrogen plasma to create amino-functionality on SiNx.
Covalent immobilization of proteins and oligonucleotides using a photoactivable crosslinker.

Main Results:

High-density amino groups were introduced on SiNx surfaces with minimal damage.
Selective amination of SiNx over Si was achieved.
Greater than 90% surface coverage for protein immobilization and successful ssDNA immobilization and hybridization were demonstrated.

Conclusions:

A uniform, reliable, fast, and economical technique for biofunctionalizing SiNx surfaces was established.
This method supports the development of compact, high-sensitivity biosensors.