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Depth Resolution Dependence on Sample Thickness and Incident Energy in On-Axis Transmission Kikuchi Diffraction in

Etienne Brodu1, Emmanuel Bouzy1

  • 11Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux (LEM3),UMR CNRS 7239,Université de Lorraine,57045 Metz,France.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|December 29, 2017
PubMed

Keywords:
Depth resolutionelectron diffractionmean absorption coefficientscanning electron microscope (SEM)transmission Kikuchi diffraction (TKD)

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