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Updated: Feb 16, 2026

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Published on: September 22, 2023
Hybrid setup for micro- and nano-computed tomography in the hard X-ray range
Christian Fella1, Andreas Balles1, Randolf Hanke1
1Chair for X-ray Microscopy, Julius-Maximilians-Universität Würzburg, 97074 Würzburg, Germany.
A new compact X-ray microscope offers versatile non-destructive testing. This hybrid instrument combines micro-computed tomography (micro-CT) and high-resolution microscopy for detailed 3D sample analysis.
Area of Science:
- Materials Science
- Physics
- Engineering
Background:
- Non-destructive testing (NDT) is crucial for miniaturized industrial and medical applications.
- X-ray microscopy provides 3D volumetric data through computed tomography (CT).
Purpose of the Study:
- To describe a novel compact X-ray microscope for advanced NDT.
- To highlight its hybrid capabilities for multi-modal analysis.
Main Methods:
- Development of a compact hard X-ray microscope (9 keV) utilizing a liquid-metal-jet source.
- Implementation of two distinct operational modes: micro-CT without optics and magnified X-ray microscopy with optics.
- Enabling mode switching without sample repositioning.
Main Results:
- Micro-CT mode achieves 1 μm resolution for millimeter-sized samples.
- Microscopy mode resolves features down to 150 nm.
- The instrument integrates both modes seamlessly for comprehensive sample investigation.
Conclusions:
- The developed instrument advances laboratory-based multi-mode X-ray microscopy.
- It offers a significant step towards establishing high-resolution X-ray microscopy as a standard investigation method for microscopic samples.
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