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Related Concept Videos

Atomic Force Microscopy01:08

Atomic Force Microscopy

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Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...
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Intermolecular Forces03:13

Intermolecular Forces

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Atoms and molecules interact through bonds (or forces): intramolecular and intermolecular. The forces are electrostatic as they arise from interactions (attractive or repulsive) between charged species (permanent, partial, or temporary charges) and exist with varying strengths between ions, polar, nonpolar, and neutral molecules. The different types of intermolecular forces are ion–dipole, dipole–dipole, hydrogen bonds, and dispersion; among these, dipole–dipole, hydrogen...
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Intermolecular vs Intramolecular Forces03:00

Intermolecular vs Intramolecular Forces

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Intermolecular forces (IMF) are electrostatic attractions arising from charge-charge interactions between molecules. The strength of the intermolecular force is influenced by the distance of separation between molecules. The forces significantly affect the interactions in solids and liquids, where the molecules are close together. In gases, IMFs become important only under high-pressure conditions (due to the proximity of gas molecules). Intermolecular forces dictate the physical properties of...
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Electromotive Force02:36

Electromotive Force

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Electricity is generated by either electrons or ions flowing through a solution or a conducting medium. This flow of electrons or specifically electrical charge is defined as an electric current. When electrons move through a wire, they generate an electric current. It can be recalled  that in a redox reaction, electrons are lost and gained. In the spontaneous redox reaction of zinc  with copper, when zinc is immersed in a copper ion solution, a transfer of electrons from one substance to...
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Comparing Intermolecular Forces: Melting Point, Boiling Point, and Miscibility02:34

Comparing Intermolecular Forces: Melting Point, Boiling Point, and Miscibility

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Intermolecular forces are attractive forces that exist between molecules. They dictate several bulk properties, such as melting points, boiling points, and solubilities (miscibilities) of substances. Molar mass, molecular shape, and polarity affect the strength of different intermolecular forces, which influence the magnitude of physical properties across a family of molecules.
Temporary attractive forces like dispersion are present in all molecules, whether they are polar or nonpolar. They...
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Intermolecular Forces in Solutions02:28

Intermolecular Forces in Solutions

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The formation of a solution is an example of a spontaneous process, a process that occurs under specified conditions without energy from some external source.
When the strengths of the intermolecular forces of attraction between solute and solvent species in a solution are no different than those present in the separated components, the solution is formed with no accompanying energy change. Such a solution is called an ideal solution. A mixture of ideal gases (or gases such as helium and argon,...
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Related Experiment Video

Updated: Feb 16, 2026

Atomic Force Microscopy Imaging and Force Spectroscopy of Supported Lipid Bilayers
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Atomic Force Microscopy Imaging and Force Spectroscopy of Supported Lipid Bilayers

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Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor.

Danish Hussain1,2, Yongbing Wen3, Hao Zhang4

  • 1State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, 2 Yikuang, Nangang District, Harbin 150080, China. danishasefi@hit.edu.cn.

Sensors (Basel, Switzerland)
|January 6, 2018
PubMed
Summary

This study introduces an atomic force microscopy (AFM) method using a quartz tuning fork (QTF) sensor for precise sidewall roughness measurement in micro-electromechanical systems (MEMS) and nanoelectronics. The novel sensor configuration achieves high lateral resolution and reduced friction for accurate 3D sidewall imaging.

Keywords:
atomic force microscopycantileverquartz tuning forksidewall

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Metrology

Background:

  • Sidewall roughness is critical for micro-electromechanical systems (MEMS) and nanoelectronics.
  • Atomic force microscopy (AFM) offers high-resolution 3D imaging for surface analysis.

Purpose of the Study:

  • To develop and demonstrate an AFM method for accurate sidewall roughness measurement.
  • To utilize a quartz tuning fork (QTF) force sensor for enhanced sidewall scanning.

Main Methods:

  • Fabrication of a self-sensing force sensor by microassembling an AFM cantilever to a QTF.
  • Employing the QTF-based sensor for orthogonal tip-surface detection to minimize lateral friction.
  • Scanning sidewalls of MEMS structures and standard step gratings using the developed AFM method.

Main Results:

  • Achieved high-sensitivity force detection with a 7.4% Q factor reduction.
  • Demonstrated high lateral resolution sidewall imaging.
  • Successfully measured sidewall roughness, line edge roughness, and sidewall angles.

Conclusions:

  • The QTF-based AFM sensor enables precise and high-resolution sidewall imaging.
  • This method is effective for characterizing critical dimensions in MEMS and nanoelectronic devices.
  • The orthogonal detection reduces friction, improving measurement accuracy.