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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

Shudong Wang1, Xueyong Wei2, Yinsheng Weng3

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China. shudong_wang@outlook.com.

Sensors (Basel, Switzerland)
|January 26, 2018
PubMed

Keywords:
MEMSdouble-ended tuning forkoscillatorresonatortilt sensor

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