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EUV polarimetry for thin film and surface characterization and EUV phase retarder reflector development

A E H Gaballah1, P Nicolosi1, Nadeem Ahmed1

  • 1University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.

The Review of Scientific Instruments
|February 3, 2018
PubMed

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