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Updated: Feb 15, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

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Dynamic changes in higher-order aberrations after correction of lower-order aberrations with adaptive optics in

Yanglin Jiang, Yan Wang, Jiamei Zhang

    Applied Optics
    |February 6, 2018
    PubMed

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