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Array Tomography Workflow for the Targeted Acquisition of Volume Information using Scanning Electron Microscopy
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Large-volume, low-cost, high-precision FMCW tomography using stitched DFBs.
Optics Express
|February 7, 2018
Summary
This study introduces a low-cost 3D imaging system combining optical frequency-modulated continuous-wave (FMCW) reflectometry and swept-source optical coherence tomography (SS-OCT) capabilities. It achieves high-resolution imaging over long distances, enabling detailed surface interrogation.
Area of Science:
- Optics and Photonics
- Metrology
- Imaging Systems
Background:
- Optical frequency-modulated continuous-wave (FMCW) reflectometry offers long-range, high-resolution distance measurements.
- Swept-source optical coherence tomography (SS-OCT) provides high-resolution depth imaging at high scan speeds over shorter distances.
- Existing technologies present trade-offs between range, resolution, speed, and cost.
Purpose of the Study:
- To develop a low-cost, low-bandwidth 3D imaging system.
- To achieve high axial resolution imaging over extended FMCW ranging depths.
- To enable long-distance, high-resolution surface interrogation in a compact package.
Main Methods:
- Integration of 12 distributed feedback laser (DFB) elements from a single butterfly module.
- Implementation of active sweep linearization to reduce signal processing.
- Combination of FMCW reflectometry principles with SS-OCT imaging capabilities.
Main Results:
- Achieved an axial resolution of 27.1 μm.
- Demonstrated imaging over a depth of 6 meters and a volume of up to 14 cubic meters.
- Successfully generated sub-surface OCT-style tomograms and 3D maps of various objects.
Conclusions:
- The developed system bridges the gap between FMCW reflectometry and SS-OCT.
- It offers a unique combination of long-range, high-resolution 3D imaging at a low cost.
- Potential applications include non-destructive testing, metrology, and remote sensing.
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