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Monte Carlo simulation and theoretical calculation of SEM image intensity and its application in thickness

Jinsen Tian1, Jing Wu1, Yu-Lung Chiu1

  • 1School of Metallurgy and Materials, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK.

Ultramicroscopy
|February 8, 2018
PubMed

Keywords:
Backscattered electronMonte Carlo simulationSEMSecondary electronThickness measurement

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