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Updated: Feb 14, 2026
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Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
Published on: July 26, 2014
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Gas-assisted silver deposition with a focused electron beam
Luisa Berger1, Katarzyna Madajska2, Iwona B Szymanska2
1Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
Beilstein Journal of Nanotechnology
|February 15, 2018
Summary
Silver(I) pentafluoropropionate was used for focused electron beam induced deposition (FEBID) for the first time, yielding silver deposits with high purity and good electrical properties for plasmonic applications.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Focused electron beam induced deposition (FEBID) offers high-resolution direct-write fabrication.
- Identifying suitable precursors is crucial for FEBID applications, particularly in plasmonics.
- Silver is a key material for plasmonic applications due to its optical properties.
Purpose of the Study:
- To investigate the use of silver(I) pentafluoropropionate as a precursor for FEBID.
- To characterize the resulting silver deposits for potential plasmonic applications.
- To explore the influence of process parameters on silver deposition.
Main Methods:
- Focused electron beam induced deposition (FEBID) using silver(I) pentafluoropropionate.
- Transmission Electron Microscopy (TEM) for material analysis.
- Electrical property measurements and Raman spectroscopy for performance evaluation.
Main Results:
- Deposits achieved up to 76 atom % silver content.
- TEM confirmed pure silver crystallites within a carbon matrix.
- Deposited silver exhibited good electrical properties and strong Raman signal enhancement.
- Silver crystal growth was found to be dependent on electron dose and precursor refreshment.
Conclusions:
- Silver(I) pentafluoropropionate is a viable precursor for FEBID of silver.
- The resulting silver deposits show promise for plasmonic applications.
- Process parameter optimization is key for controlling silver deposition in FEBID.
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