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Fabrication of Zinc Oxide-Based Thin-Film Transistors by Radio Frequency Sputtering for Ultraviolet Sensing

Ming-Hung Hsu1, Sheng-Po Chang1, Shoou-Jinn Chang1

  • 1Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, Taiwan.

Journal of Nanoscience and Nanotechnology
|February 15, 2018
PubMed

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