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Doping Nitrogen in InGaZnO Thin Film Transistor with Double Layer Channel Structure

Sheng-Po Chang1, Deng Shan1

  • 1Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center National Cheng Kung University, Tainan 70101, Taiwan.

Journal of Nanoscience and Nanotechnology
|February 15, 2018
PubMed

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