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Updated: Feb 14, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Shape anisotropy revisited in single-digit nanometer magnetic tunnel junctions
K Watanabe1, B Jinnai2, S Fukami3,4,5,6
1Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, 980-8577, Japan.
Researchers developed novel magnetic tunnel junctions for spintronics. Shape anisotropy enables current-driven magnetization switching below 10 nm, offering high thermal stability for next-gen nano-magnetics.
Area of Science:
- Spintronics
- Materials Science
- Nanotechnology
Background:
- Magnetic tunnel junctions (MTJs) are crucial for magnetoresistive random-access memories (MRAM).
- Achieving low switching currents and high thermal stability simultaneously is essential for reducing MTJ size.
- Current perpendicular MTJs using CoFeB/MgO stacks are limited to ~20 nm.
Purpose of the Study:
- To explore a new approach for fabricating MTJs at ultrafine scales (<10 nm).
- To investigate the role of shape anisotropy in achieving desired MTJ properties.
- To enable magnetization switching solely by current in sub-10 nm MTJs.
Main Methods:
- Revisiting and utilizing shape anisotropy in MTJ design.
- Fabricating MTJs at the nanoscale, focusing on dimensions below 10 nm.
- Experimental characterization of magnetization switching and thermal stability.
Main Results:
- Demonstrated current-driven magnetization switching in MTJs smaller than 10 nm.
- Shape anisotropy provided sufficient thermal stability without new materials.
- Successfully satisfied requirements for ultrafine-scale MTJs.
Conclusions:
- Shape anisotropy is a viable strategy for advancing MTJ technology to single-digit nanometer scales.
- This approach can overcome limitations of current perpendicular MTJ systems.
- The findings are expected to accelerate the development of nano-magnetics and spintronics devices.
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