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Fabrication of Si Micro Mold via Tribo-Nanolithography Using Micro Polycrystalline Diamond Cantilever Tool

Uk Su Kim1, Jeong Woo Park2

  • 1Department of Mechanical System Engineering, Chosun University, Gwangju, 61452, Republic of Korea.

Journal of Nanoscience and Nanotechnology
|February 17, 2018
PubMed

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