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Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity
Jiangbo He1, Wu Zhou2, Huijun Yu3
1School of Mechanical Engineering, Xihua University, Chengdu 610039, China. chuihaol@aliyun.com.
Sensors (Basel, Switzerland)
|February 23, 2018
Summary
This study presents a novel structural design for microelectromechanical systems (MEMS) capacitive accelerometers, achieving both low temperature coefficients and high linearity. The improved design enhances performance by optimizing the wide-narrow gaps ratio (WNGR).
Area of Science:
- MEMS technology
- Sensor design
- Mechanical engineering
Background:
- High-performance microelectromechanical systems (MEMS) capacitive accelerometers require low temperature coefficients and high linearity.
- Existing designs face challenges in simultaneously optimizing these parameters due to conflicting effects.
Purpose of the Study:
- To develop a novel structural design for bulk MEMS capacitive accelerometers.
- To achieve both a low temperature coefficient and high linearity in accelerometer performance.
- To address the contrary effects of the wide-narrow gaps ratio (WNGR) on performance metrics.
Main Methods:
- Investigated the impact of WNGR on temperature coefficient of scale factor (TCSF) and linearity error.
- Proposed and analyzed an improved structural design to mitigate these conflicting effects.
- Optimized the precise structural design for reduced temperature coefficient of bias (TCB), TCSF, and linearity error.
- Experimentally verified the performance of the precisely designed structure.
Main Results:
- The wide-narrow gaps ratio (WNGR) exhibits a contrary effect on TCSF and linearity error in conventional designs.
- An improved structure effectively mitigates the contrary effect of WNGR.
- Within the improved structure, increasing WNGR leads to decreased TCSF and linearity error.
- Precise design optimization resulted in significantly lower TCB, TCSF, and linearity error.
Conclusions:
- The developed structural design successfully achieves low temperature coefficients and high linearity for MEMS capacitive accelerometers.
- The improved design and precise optimization offer a viable solution for enhancing accelerometer performance.
- Experimental verification confirms the effectiveness of the proposed structural design.
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