Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Jiangbo He1, Wu Zhou2, Huijun Yu3

  • 1School of Mechanical Engineering, Xihua University, Chengdu 610039, China. chuihaol@aliyun.com.

Sensors (Basel, Switzerland)
|February 23, 2018
PubMed

Keywords:
MEMScapacitive accelerometerlinearity errortemperature coefficient

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