Related Experiment Video
Updated: Jan 7, 2026
10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
10.7K
High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors.
Longqi Ran1, Yan Wang1, Zhongrui Ma1
1School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.
Micromachines
|December 31, 2025
Summary
This study introduces a novel 16-photodiode (PD) array sensor for precise angle detection in 2D MEMS mirrors, improving accuracy for LiDAR applications. The new optical sensor achieves high precision, essential for advanced scanning and imaging systems.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Optical Sensing
- LiDAR Technology
Background:
- 2D MEMS mirrors are crucial for LiDAR scanning and imaging.
- Existing piezoresistive angle detection methods lack accuracy and are sensitive to temperature.
- Current MEMS mirror angle detection limits hinder vehicular and airborne applications.
Purpose of the Study:
- To develop a high-precision angle detection scheme for 2D MEMS mirrors.
- To overcome limitations of existing piezoresistive sensors.
- To enhance MEMS mirror performance for advanced LiDAR systems.
Main Methods:
- Analysis of geometric optics principles for angle detection.
- Design and implementation of a novel four-quadrant optical measurement sensor.
- Utilizing a 16-photodiode (PD) array instead of large-area PDs.
- Measuring current variations from reflected spot position on PDs.
Main Results:
- The proposed 16-PD array sensor significantly mitigates nonlinearity and accuracy issues.
- Achieved high-precision angle detection accuracy between 0.03° and 0.036°.
- Demonstrated effectiveness over a detection range of ±8°.
Conclusions:
- The novel 16-PD array optical sensor offers superior accuracy and reliability for MEMS LiDAR.
- This technology meets the stringent requirements for vehicular and airborne scanning.
- The developed sensor represents a significant advancement in MEMS mirror angle detection.
