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Updated: Feb 13, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Direct Li+ incorporation during the anodic formation of compact TiO2 layers
J A Peñafiel-Castro1, B Hahn, R L Maltez
1Depto. Metalurgia, Escola de Engenharia Universidade Federal do Rio Grande do Sul, Av. Bento Gonçalves 9500, 91501-970, Porto Alegre, RS, Brazil. lfdick@ufrgs.br@ufrgs.br.
Abstract:
In this work, compact titanium oxide layers are formed by anodization in 1 M H3PO4 aqueous electrolyte containing LiClO4. Elastic Recoil Detection Analysis (ERDA) measurements demonstrate that incorporation of lithium ions occurs during anodization, and cell-voltage transient measurements evidence the different electronic properties of Li-doped TiO2 layers. The mechanism of direct incorporation of Li during the fabrication of TiO2 layers is discussed.
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