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The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
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Porous Aluminum Oxide and Magnesium Oxide Films Using Organic Hydrogels as Structure Matrices

Zimei Chen1,2, Dirk Kuckling3, Michael Tiemann4

  • 1Department of Chemistry-Organic and Macromolecular Chemistry, Paderborn University, 33098 Paderborn, Germany. zimei.chen@uni-paderborn.de.

Nanomaterials (Basel, Switzerland)
|March 23, 2018
PubMed

Keywords:
Al2O3FIBKr physisorptionMgOSEMhydrogelmesoporouspoly(dimethylacrylamide)spin coatingthin film

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