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Related Experiment Video

Updated: Feb 12, 2026

Atomically Traceable Nanostructure Fabrication
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Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes.

Peter van Assenbergh1, Erwin Meinders2, Jo Geraedts3

  • 1Department of BioMechanical Engineering, Faculty of Mechanical, Maritime and Materials Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands.

Small (Weinheim an Der Bergstrasse, Germany)
|March 25, 2018
PubMed
Summary

This study reviews fabrication methods for nanostructures and microstructures based on performance, not just processing capabilities. It provides a guide to select the best method for achieving desired properties like resolution and complexity.

Keywords:
microfabricationmicrostructuresnanofabricationnanostructures

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Area of Science:

  • Materials Science
  • Manufacturing Engineering
  • Nanotechnology

Background:

  • Designing microstructures and nanostructures traditionally relies on available fabrication methods.
  • A performance-based design pathway requires matching fabrication techniques to desired structural properties.

Purpose of the Study:

  • To review and compare fabrication methods for micro/nanostructures based on performance metrics.
  • To provide a decision-making tool for selecting fabrication methods for specific performance requirements.

Main Methods:

  • Reviewed ten groups of fabrication methods.
  • Compared methods based on geometric/material complexity, resolution, size, diversity, and throughput.
  • Evaluated methods independently of specific processing capabilities.

Main Results:

  • Electron beam lithography offers the highest resolution (<5 nm features).
  • Vat photopolymerization achieves the highest geometric complexity.
  • Parallel methods like photolithography are essential for high throughput (≈10¹ m² h⁻¹).

Conclusions:

  • Fabrication method selection can be guided by desired performance metrics.
  • This review offers a framework for choosing appropriate micro/nanofabrication techniques.