PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

Area of Science:

• Electrical Engineering
• Mechanical Engineering
• Materials Science

Background:

• Capacitive microelectromechanical systems (MEMS) gyroscopes are crucial for inertial navigation.
• High costs associated with MEMS gyroscope prototype development necessitate efficient simulation methods.

Purpose of the Study:

• To establish a PSPICE hybrid model for simulating capacitive MEMS gyroscopes.
• To reduce the cost and time of MEMS gyroscope prototype development through accurate simulation.

Main Methods:

• Developing a modular PSPICE hybrid model for MEMS gyroscopes.
• Integrating detailed MEMS gyroscope characteristics, including an accurate capacitance model, mechanical thermal noise, and ambient temperature effects.
• Performing hybrid closed-loop simulations for temperature compensation and interface circuit optimization.

Main Results:

• The developed PSPICE hybrid model accurately simulates MEMS gyroscope behavior.
• The model incorporates non-approximated capacitance, mechanical thermal noise, and ambient temperature effects.
• Simulations demonstrate that the output voltage is directly proportional to the angular rate input, confirming model validity.

Conclusions:

• The PSPICE hybrid model offers a cost-effective and accurate approach for MEMS gyroscope simulation.
• The model facilitates the optimization of temperature compensation schemes and interface circuits.
• This validated model can accelerate the development of advanced MEMS gyroscope technologies.