A high bandwidth three-axis out-of-plane motion measurement system based on optical beam deflection

Multi-axis measurement of motion is indispensable for characterization of dynamic systems and control of motion stages. This paper presents an optical beam deflection-based measurement system to simultaneously measure three-axis out-of-plane motion of both micro- and macro-scale targets. Novel strategies are proposed to calibrate the sensitivities of the measurement system. Subsequently the measurement system is experimentally realized and calibrated. The system is employed to characterize coupled linear and angular motion of a piezo-actuated stage. The measured motion is shown to be in agreement with theoretical expectation. Next, the high bandwidth of the measurement system has been showcased by utilizing it to measure coupled two-axis transient motion of a Radio Frequency Micro-Electro-Mechanical System switch with a rise time of about 60 μs. Finally, the ability of the system to measure out-of-plane angular motion about the second axis has been demonstrated by measuring the deformation of a micro-cantilever beam.