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Quality Aspects in Production of Electronic Grade Chemicals in Multipurpose Plants
Xenia Beyrich-Graf1, Guy Seltensperger2
1BASF SE Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein, Germany;,
Chimia
|April 11, 2018
Summary
Producing high-purity electronic chemicals requires stringent quality control. This study details the successful scale-up of a specialty electronic chemical from lab synthesis to industrial production in a multipurpose plant.
Area of Science:
- Materials Science
- Chemical Engineering
- Semiconductor Manufacturing
Background:
- Miniaturization in electronics demands ultra-pure chemicals for manufacturing microchips and displays.
- Contamination is unacceptable in semiconductor and display panel production.
- Electronic grade chemicals must meet the highest purity and quality consistency standards.
Purpose of the Study:
- To describe the process of scaling up a small-volume electronic specialty material from laboratory synthesis to production.
- To demonstrate the successful production of high-quality electronic chemicals in a multipurpose plant.
- To highlight the importance of quality requirements in the electronics industry.
Main Methods:
- Laboratory synthesis of an electronic specialty material.
- Development of a production process suitable for a multipurpose plant.
- Implementation of stringent quality control measures throughout the scale-up process.
Main Results:
- Successfully transitioned an electronic chemical from lab-scale to industrial production.
- Achieved high purity and quality consistency required for electronic device manufacturing.
- Demonstrated the viability of using existing multipurpose plant infrastructure for specialty chemical production.
Conclusions:
- The scale-up of electronic chemicals can be successfully managed within existing multipurpose production facilities.
- Adherence to strict quality requirements is paramount for producing materials for the electronics industry.
- This approach enables the efficient production of high-demand electronic specialty materials.
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