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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
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Synthesis of Patterned Vertically Aligned Carbon Nanotubes by PECVD Using Different Growth Techniques: A Review

Aparna Gangele, Chandra Shekhar Sharma, Ashok Kumar Pandey

    Journal of Nanoscience and Nanotechnology
    |April 12, 2018
    PubMed
    Summary

    This review summarizes key parameters influencing the growth of vertically aligned carbon nanotubes (VAC-NTs). It provides researchers with trends and techniques for fabricating and analyzing these advanced nanomaterials.

    Keywords:
    "Carbon Nanotubes (CNTs)Multi Walled Carbon Nanotubes (MWCNTs)Single Walled Carbon Nanotubes (SWCNTs)Vertically Aligned Carbon Nanotubes (VACNTs)Chemical Vapor Deposition (CVD)CNT Growth Mechanism, CNT PrecursorCNT Catalyst

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