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High-resolution Patterning Using Two Modes of Electrohydrodynamic Jet: Drop on Demand and Near-field Electrospinning
Published on: July 10, 2018
Nanoscale coaxial focused electrohydrodynamic jet printing
Dazhi Wang1, Xiaojun Zhao, Yigao Lin
1Key Laboratory for Micro/Nano Technology and System of Liaoning Province, School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China.
Coaxial focused electrohydrodynamic jet printing enables high-resolution, cost-effective fabrication of functional nanostructures. This method precisely positions nanoscale features for advanced micro/nano-electromechanical systems (M/NEMS) devices.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Controlled positioning of nanostructures is crucial for high-performance micro/nano-electromechanical systems (M/NEMS).
- Existing fabrication methods often face limitations in resolution, speed, or cost-effectiveness.
Purpose of the Study:
- To demonstrate a novel, high-resolution, high-speed, and cost-effective fabrication method for functional nanostructures.
- To achieve precise control over the placement and characteristics of printed nanostructures.
Main Methods:
- Development of a coaxial needle system for focused electrohydrodynamic jet printing.
- Utilizing a stable coaxial jet with inner functional ink and outer high-viscosity liquid to focus the jet to the nanoscale.
- Optimizing electrical and viscous forces to induce shearing and pressure for nano-jet focusing.
Main Results:
- Direct printing of nanostructures, including highly aligned nanowire arrays, nano-freebeams, and nano-cantilever beams, down to 40 nm scale.
- Achieved a high ratio of needle size (130 μm) to printed structure size (up to 3250:1).
- Printed lead zirconate titanate (PZT) nanostructures demonstrated pure perovskite structures and distinct piezoelectric responses.
Conclusions:
- Coaxial focused electrohydrodynamic jet printing offers a viable technique for controllable nanoscale fabrication using micrometer-sized needles.
- The method enables the precise creation of functional nanostructures for advanced M/NEMS applications.
- The printed PZT nanostructures show promising properties for piezoelectric applications.
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