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Updated: Feb 11, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Morphology-controlled epitaxial vanadium dioxide low-dimensional structures: the delicate effects on the phase
W M Xiong1, Jian Shao, Y Q Zhang
1State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics, Sun Yat-sen University, 510275, Guangzhou, China. zhengy35@mail.sysu.edu.cn.
Vanadium dioxide (VO2) exhibits a metal-insulator transition (MIT) crucial for electronic devices. Fabricating low-dimensional structures (LDSs) of VO2 and understanding substrate interactions are key to controlling this MIT behavior.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Vanadium dioxide (VO2) is a strongly correlated electron material.
- VO2 exhibits a significant metal-insulator transition (MIT) with large changes in conductance and transmittance.
- Controlling the MIT behavior is essential for fundamental studies and applications.
Purpose of the Study:
- To fabricate diverse low-dimensional structures (LDSs) of VO2.
- To investigate the influence of deposition factors and substrates on VO2 LDS growth.
- To understand the phase transition characteristics of VO2 LDSs and their dependence on structure and substrate.
Main Methods:
- Pulsed laser deposition (PLD) technique for fabricating VO2 LDSs.
- Transmission Electron Microscopy (TEM) for assessing crystallinity.
- Atomic Force Microscopy (AFM) and ab initio calculations for substrate influence.
- Temperature-dependent Raman spectroscopy and X-ray Diffraction (XRD) for phase transition analysis.
Main Results:
- Successful fabrication of various VO2 LDSs (0D, 1D, 2D, and mixed structures) with high crystallinity.
- Demonstrated significant influence of substrates on the growth orientation of VO2 LDSs.
- Revealed the structural dependence of VO2 MIT features, influenced by substrate interactions.
- Established a rapid, controllable, and facile method for VO2 LDS fabrication.
Conclusions:
- The study provides a robust method for fabricating VO2 LDSs with controlled properties.
- Understanding substrate effects is crucial for tailoring VO2 MIT behavior.
- The fabricated VO2 LDSs offer potential for deeper investigation into their electrical, optical, and magnetic properties and applications.
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Phase Transitions
Phase Transitions: Sublimation and Deposition
Phase Transitions: Melting and Freezing
Phase Transitions: Vaporization and Condensation
Phase-lead and Phase-lag Controllers
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