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    Area of Science:

    • Materials Science
    • Nanotechnology
    • Spectroscopy

    Background:

    • Two-dimensional (2D) materials exhibit unique properties driving significant research interest.
    • Conventional Raman mapping is limited to small areas (hundreds of micrometers) due to focus depth and substrate issues.
    • Wafer-scale characterization is crucial for the practical application of 2D materials.

    Purpose of the Study:

    • To develop a cost-effective and efficient large-area autofocusing Raman mapping (LARM) system.
    • To overcome the limitations of conventional Raman mapping for wafer-scale analysis.
    • To enable nondestructive optical characterization of 2D materials across large areas.

    Main Methods:

    • A modified centroid method was employed to create a facile LARM system.
    • The Raman excitation laser was utilized as the focusing laser to reduce system complexity and cost.
    • A self-written autofocusing algorithm, based on laser reflection image analysis, enables real-time focus adjustment.

    Main Results:

    • The developed LARM system successfully demonstrated wafer-scale Raman scanning.
    • Thickness distribution of few-layer WS2 triangle domains and polycrystalline MoS2 films (up to 2-inch scale) was accurately revealed.
    • The system achieved real-time focus adjustment during large-scale scanning.

    Conclusions:

    • The presented LARM system offers a practical solution for wafer-scale nondestructive optical characterization of 2D materials.
    • This method significantly enhances the efficiency and scalability of Raman mapping for 2D materials.
    • The findings pave the way for advanced characterization techniques in 2D material research and development.