Two-dimensional beam-steering device using a doubly periodic Si photonic-crystal waveguide

Area of Science:

• Photonics
• Nanotechnology
• Optical Engineering

Background:

• Traditional optical beam steering often relies on mechanical components, limiting speed and integration.
• On-chip optical devices are crucial for miniaturization and advanced photonic integrated circuits.

Purpose of the Study:

• To demonstrate a nonmechanical, on-chip optical beam-steering device.
• To achieve two-dimensional (2D) beam steering with high resolution and minimal divergence.

Main Methods:

• Fabrication of a photonic-crystal waveguide with a doubly periodic structure using complementary metal-oxide-semiconductor (CMOS) processes.
• Integration of four waveguides selected by a Mach-Zehnder optical switch.
• Implementation of lateral beam steering using a cylindrical lens.

Main Results:

• Achieved a longitudinal beam deflection angle of 24° with a divergence angle of 0.3°.
• Demonstrated lateral beam steering capability.
• Successfully combined longitudinal and lateral steering for 2D scanning with 80 × 4 resolution points.

Conclusions:

• The developed photonic-crystal waveguide device offers efficient, nonmechanical, on-chip optical beam steering.
• This technology enables precise 2D beam scanning for various photonic applications.
• CMOS fabrication ensures potential for scalable and cost-effective production.