Two-dimensional beam-steering device using a doubly periodic Si photonic-crystal waveguide
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Updated: Feb 11, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Abstract:
We demonstrate a nonmechanical, on-chip optical beam-steering device using a photonic-crystal waveguide with a doubly periodic structure that repeats the increase and decrease of the hole diameter. We fabricated the device using a complementary metal-oxide-semiconductor process. We obtained a beam-deflection angle of 24° in the longitudinal direction, while maintaining a divergence angle of 0.3°. Four such waveguides were integrated, and one was selected by a Mach-Zehnder optical switch. We obtained lateral beam steering by placing a cylindrical lens above these waveguides. By combining the lateral and longitudinal beam steering, we were able to scan the collimated beam in two dimensions, with 80 × 4 resolution points.
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