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Measuring topographies from conventional SEM acquisitions.

Qiwei Shi1, Stéphane Roux2, Félix Latourte3

  • 1LMT, ENS Paris-Saclay / CNRS /, Université Paris-Saclay, 61 avenue du Président Wilson, Cachan 94235, France; EDF R&D, Site des Renardières, avenue des Renardières, Ecuelles, Moret-sur-Loing 77818 France.

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Summary
This summary is machine-generated.

This study accurately estimates surface topography using stereoscopic imaging and Digital Image Correlation, even at large angles. Comparing methods on strained steel reveals crystal rotation

Keywords:
Crystal plasticityDigital image correlationFocused ion beamSEMTopography

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Area of Science:

  • Materials Science
  • Surface Metrology
  • Electron Microscopy

Background:

  • Surface topography estimation is crucial for understanding material behavior.
  • Existing methods for surface topography analysis have limitations, especially under mechanical stress.
  • Electron Backscatter Diffraction (EBSD) provides crystallographic information but requires surface topography data.

Purpose of the Study:

  • To extend stereoscopic imaging for surface topography estimation to orientations suitable for EBSD analysis.
  • To validate the accuracy of Digital Image Correlation (DIC) for topography determination at large angles.
  • To compare DIC-based topography with FIB-SEM and EBSD crystal rotation methods.

Main Methods:

  • Stereoscopic imaging at normal and 70° orientations.
  • Regularized global Digital Image Correlation (DIC) for topography calculation.
  • 3D Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) for topography reconstruction.
  • EBSD for measuring crystal rotations during in situ mechanical testing.

Main Results:

  • Accurate surface topography determination was achieved using DIC at a 70° inclination.
  • DIC-derived topography closely matched FIB-SEM results on a strained steel specimen.
  • Crystal rotations from EBSD, though ignoring plastic deformation, accounted for a significant portion of topography changes.

Conclusions:

  • Stereoscopic imaging with DIC is a robust method for surface topography analysis, adaptable to EBSD orientations.
  • Combining DIC with FIB-SEM and EBSD offers a comprehensive approach to studying deformation-induced surface topography.
  • Crystal rotation analysis provides valuable insights into elastic deformation contributions to surface topography changes.