Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature

A A Arends1, T M Germain1, J F Owens1

  • 1Department of Mechanical and Aerospace Engineering, College of Engineering and Computer Science, University of Central Florida, Orlando, Florida 32816, USA.

Summary

This study introduces a new reflectometer-interferometer tool for measuring thin-film properties. The apparatus accurately characterizes fluid layers and meniscus profiles during evaporation, crucial for understanding thin-film behavior.

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