Deterministic Role of Collision Cascade Density in Radiation Defect Dynamics in Si

J B Wallace1,2, L B Bayu Aji1, L Shao2

  • 1Lawrence Livermore National Laboratory, Livermore, California 94550, USA.

Summary

Dynamic annealing of radiation damage in silicon is influenced by irradiation conditions. A pulsed ion beam method reveals cascade density as a key parameter controlling defect dynamics and annealing rates across different temperatures.

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