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Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors
R Tao1, S A Hasan1, H Z Wang1,2
1Faculty of Engineering and Environment, Northumbria University, Newcastle upon Tyne, NE1 8ST, UK.
Scientific Reports
|June 15, 2018
Summary
This study introduces a novel design for surface acoustic wave (SAW) temperature sensors using flexible substrates. The new approach significantly enhances temperature sensitivity on curved surfaces, enabling cost-effective applications.
Area of Science:
- Materials Science
- Sensor Technology
- Acoustics
Background:
- Surface acoustic wave (SAW) sensors face challenges in detecting temperature on non-planar surfaces.
- Maximizing the temperature coefficient of frequency (TCF) is crucial for enhanced sensitivity.
Purpose of the Study:
- To develop a new design methodology for SAW temperature sensors.
- To enhance TCF values for improved performance on flexible and curved surfaces.
Main Methods:
- Utilized finite element analysis (FEA) simulations for theoretical TCF calculations.
- Fabricated SAW devices using ZnO thin films on aluminum foil and plate substrates.
- Investigated the impact of substrate thickness and normalized wavelength (λ/h) on TCF.
Main Results:
- Experimental TCF values closely matched simulation predictions.
- A significant increase in TCF was observed when the normalized wavelength (λ/h) exceeded 1.
- Achieved a record TCF of -760 ppm/K for ZnO/Al SAW devices on 50 μm thick aluminum foil.
Conclusions:
- The proposed design methodology effectively maximizes TCF for SAW sensors.
- This approach enables the development of low-cost temperature sensors for flexible substrates.
- The normalized wavelength parameter is key to optimizing TCF in these devices.
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