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Quasi-parallel precession diffraction: Alignment method for scanning transmission electron microscopes.

S Plana-Ruiz1, J Portillo2, S Estradé3

  • 1CCiT, Universitat de Barcelona, Lluís Solé i Sabarís 1-3, Barcelona 08028, Catalonia (Spain); LENS, MIND/IN2UB, Departament d'Enginyeries: Secció Electrònica, Universitat de Barcelona, Martí i Franquès 1, Barcelona 08028, Catalonia (Spain).

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Summary
This summary is machine-generated.

This study presents a method for Transmission Electron Microscopes (TEM) to achieve selectable beam convergence and probe size. It introduces 100 Hz beam precession for fast imaging, enabling advanced diffraction techniques.

Keywords:
Alignment methodsCondenser systemPrecession electron diffraction, Quasi-parallel PED-STEMSTEM

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Area of Science:

  • Materials Science
  • Physics
  • Electron Microscopy

Background:

  • Transmission Electron Microscopes (TEM) require precise control over illuminating conditions for advanced analysis.
  • Fast beam scanning and precession are crucial for high-resolution imaging and diffraction studies.

Purpose of the Study:

  • To develop a general method for setting beam convergence and probe size in TEM.
  • To integrate 100 Hz beam precession for fast imaging and diffraction pattern indexation.
  • To establish a systematic alignment method for precession on the specimen plane during fast scanning.

Main Methods:

  • Utilizing TEM with fast beam scanning control (µs/pixel) and annular dark field detection.
  • Implementing a 100 Hz beam precession technique while maintaining diffraction mode.
  • Employing image sharpness of precessed STEM images for alignment.
  • Presenting the Quasi-Parallel PED-STEM alignment method in a block diagram.

Main Results:

  • Demonstrated a method for selectable beam convergence and probe size.
  • Successfully integrated 100 Hz beam precession for high-speed imaging.
  • Validated the Quasi-Parallel PED-STEM alignment method across various instruments.
  • Provided examples of Precessed Electron Diffraction (PED) patterns and PED-STEM alignment images.

Conclusions:

  • The developed methodology enables TEM columns for acquiring Precessed Electron Diffraction Tomographies (EDT) and Scanning Nanometer Electron Diffraction (SNED).
  • This technique enhances the capability of TEM for advanced structural and chemical analysis at the nanoscale.