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Perfect Strain Relaxation in Metamorphic Epitaxial Aluminum on Silicon through Primary and Secondary Interface Misfit

Xiang-Yang Liu1, Ilke Arslan2, Bruce W Arey2

  • 1Materials Science and Technology Division , Los Alamos National Laboratory , Los Alamos , New Mexico 87545 , United States.

ACS Nano
|June 23, 2018
PubMed

Keywords:
aluminumbicrystalinterfacemetamorphicmolecular beam epitaxymolecular dynamic simulationsemicoherentsilicon

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