Ta and Ru Seed Layers Effect on the Crystallinity and Wettability of Co₆₀Fe₂₀V₂₀ Films

The following structures are deposited under the conditions (a) glass/Ru(X nm)/Co60Fe20V20(5 nm) and (b) glass/Ta(Y nm)/Co60Fe20V20(5 nm) at room temperature (RT), where X and Y is from 5 nm to 10 nm. X-ray diffraction (XRD) patterns of glass/Ru(X nm)/Co60Fe20V20(5 nm) and glass/Ta(Y nm)/Co60Fe20V20(5 nm) reveal a weak crystallization at peak β-(200) as the thicknesses of Ta increase from 8 nm to 10 nm, and the patterns indicate an amorphous state as the thicknesses of all Ru films and Ta thicknesses increase from 5 nm to 7 nm. The average contact angles of glass/Ru(X nm)/Co60Fe20V20(5 nm) and glass/Ta(Y nm)/Co60Fe20V20(5 nm) are less than 90° with testing liquids deionized (DI) water and glycerol. The average contact angle of water on the surface is nearly 90 degrees, indicating it is hydrophobic. Moreover, the maximum surface energy of glass/Ru(9 nm)/Co60Fe20V20(5 nm) and glass/Ta(10 nm)/Co60Fe20V20(5 nm) are 44.5 mJ/m2 and 37.4 mJ/m2, demonstrating that the high surface energy corresponds to a strong adhesion, which can be combined with a magnetic tunneling layer of MgO or AlOx and is compatible with other semiconductor processes in magnetic recording media and photoelectric applications.