Thermal nanometrology using piezoresistive SThM probes with metallic tips

In this paper we present design and application of novel piezoresistive scanning thermal microscopy (SThM) probes. The proposed probe integrates a piezoresistive deflection sensor and thermally active, resistive nanosize tip. Manufacturing technology includes standard silicon MEMS/CMOS processing and sophisticated postprocessing using Focus Ion Beam milling. Authors also describe dedicated measurement technique in order to perform quantitative nanoscale thermal probing. Performance of the developed thermal probes is validated by test scans (topography and temperature distribution) of silicon nanoresistors supplied with current.