Conductive Atomic Force Microscopy-Ultralow-Current Measurement Systems for Nanoscale Imaging of a Surface's
Andrzej Sikora1, Krzysztof Gajewski1,2, Dominik Badura1
1Department of Nanometrology, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, 50-370 Wrocław, Poland.
Sensors (Basel, Switzerland)
|September 14, 2024
Summary
Atomic force microscopy (AFM) enables advanced nanoscale surface analysis. This study presents three novel AFM setups for precise nanoscale current measurements, crucial for evaluating nanodevices and materials.
Area of Science:
- Nanotechnology
- Surface Science
- Materials Science
Background:
- Atomic force microscopy (AFM) is a versatile tool for nanoscale surface characterization.
- Measuring local current flow is critical for evaluating nanodevices like photovoltaic materials and semiconductor structures.
- High current densities in nanoscale measurements necessitate specialized detection setups to ensure accuracy and prevent sample damage.
Purpose of the Study:
- To introduce and validate three distinct nanoscale current measurement solutions using AFM.
- To demonstrate the performance and reliability of these advanced measurement techniques.
- To address the challenges associated with high current densities in nanoscale electrical characterization.
Main Methods:
- Development and implementation of three unique AFM-based current measurement configurations.
- Utilizing specialized detection setups designed to meet stringent requirements for range, sensitivity, noise, and bandwidth.
- Conducting performance tests on the developed solutions to validate their efficacy.
Main Results:
- Successful demonstration of three distinct nanoscale current measurement solutions.
- Test results confirm the performance and reliability of the presented AFM setups.
- The proposed methods effectively handle high current densities (above 1 kA/m²) encountered in nanoscale measurements.
Conclusions:
- The presented AFM-based current measurement solutions offer advanced capabilities for nanoscale electrical characterization.
- These techniques are suitable for evaluating a wide range of nanodevices and materials.
- The developed setups provide reliable and accurate current measurements at the nanoscale, overcoming previous limitations.
Keywords:
atomic force microscopyconductive atomic force microscopyelectrical propertiesnanoscale resistance mappingscanning spreading resistance microscopyultralow-current measurements

