Hierarchical Cascading Algorithm for 2-D FEM Simulation of Finite SAW Devices

Application of the finite-element method (FEM) for the simulation of surface acoustic wave (SAW) devices has been constrained by the large number of degrees of freedom required, resulting in large memory usage and long computation times. We propose a new 2-D algorithm that takes advantage of the periodic structure typical of SAW devices. The device is partitioned into small, repeatedly occurring building blocks. Only unique building blocks are simulated with FEM. The device geometry is presented as a hierarchical tree of cascading operations, where smaller blocks are combined into larger blocks. This is equivalent to the full FEM simulation of the device, implying the drastic reduction of memory consumption and simulation time for structures with a high degree of periodicity. The method is verified against FEM/BEM-based software. To ensure accurate and efficient simulation, the boundary conditions should be chosen according to the anisotropy of the substrate crystal.