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Updated: Feb 7, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Pietro Genoni1, Francesca Genuzio2, Tevfik Onur Menteş2
1CIMAINA, Department of Physics , Università degli Studi di Milano , via Celoria 16 , I-20133 Milan , Italy.
We developed a scalable method to pattern magnetic states using electron beams to create chemical patterns. This process induces spin reorientation transitions in cobalt, enabling control over magnetic anisotropy in specific regions.
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