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Updated: Feb 7, 2026

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
Published on: March 6, 2016
Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor
Ewelina Wajs1, Girish Rughoobur2, Andrew J Flewitt1
1Electrical Engineering Division, University of Cambridge, 9 JJ Thomson Avenue, Cambridge, CB3 0FA, UK. emw62@cam.ac.uk.
Abstract:
A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.
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