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Insulation of thin-film parylene-C/platinum probes in saline solution through encapsulation in multilayer ALD ceramic

Mats Forssell1, Xiao Chuan Ong2, Rakesh Khilwani3

  • 1Department of Electrical and Computer Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA, 15213, USA. mforssel@andrew.cmu.edu.

Biomedical Microdevices
|July 28, 2018
PubMed

Keywords:
Biomedical electrodesBiomedical materialsElectrochemical impedance spectroscopyInsulationNeural engineeringPolymer films

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