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High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with

Byung Chul Lee1,2, Amin Nikoozadeh3, Kwan Kyu Park4

  • 1Center for BioMicrosystems, Korea Institute of Science and Technology, Seoul 02792, Korea. bclee@kist.re.kr.

Sensors (Basel, Switzerland)
|August 4, 2018
PubMed
Summary

Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs achieve high output pressure. These novel CMUTs demonstrate superior performance compared to conventional designs and PZT ceramics.

Keywords:
capacitive micromachined ultrasonic transducers (CMUTs)high-efficiency output pressurenonflexural piston movementsubstrate-embedded springs

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