Gas-cluster ion sputtering: Effect on organic layer morphology

Christopher M Goodwin1, Zachary E Voras1, Thomas P Beebe1

  • 1Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716.

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|August 7, 2018
PubMed
Summary

Argon gas-cluster ion beam sputtering roughened Irganox 1010 films. Zalar rotation surprisingly did not significantly impact surface roughening, according to AFM and XPS analysis.

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