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Direct observation of leakage currents in a metal-insulator-metal capacitor using in situ transmission electron

Kangsik Kim1, Jung Hwa Kim1, Bo-Eun Park2

  • 1School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea.

Nanotechnology
|August 14, 2018
PubMed

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